*** Layer info for Hypres 4.5kA/cm2 process - Calibrated for Mask Aligner *** Author: Coenrad Fourie *** Last Modification: 10 August 2013 *** Info: Updated default sigma and descriptions * $Parameters * Global parameters * Units is the units used in input files PER METRE. This can be changed to handle large-scale modelling * For IC applications (RSFQ circuits), keep Units = 1e-6 (1 micron) Units = 1e-6 * CIFUnitsPerMicron lets InductEx know the CIF coordinate scale * If your layout tool puts out CIF files with 100 units per micron (default), use 100 * If your layout tool uses 1000 units per micron (XIC if not stripped for export), use 1000 * If you have no idea what this means, keep CIFUnitsPerMicron = 100 CIFUnitsPerMicron = 100 AbsMin = 0.001 GapMax = 2.5 GPOverhang = 2.5 ProcessHasGroundPlane = TRUE ZSegsToEC = FALSE ZSegsToEC = TRUE JoinShortSegments = TRUE LastDieLayerOrder = 10 GPLayer = 30 BlankAllLayer = 60 BlankXLayer = 61 BlankYLayer = 62 TermLayer = 63 TextLayer = 64 Lambda = 0.09 Sigma = 10 HFilaments = 1 Colour = 1 TerminalInRange = 1.0 $End * * LAYERS ** Number is GDS layer number ** Name is layer as applied in geometry input file ** Bias is the mask-wafer offset of an object's border in this layer ** Thickness is the layer thickness in microns ** Lamba is the layer's penetration depth in microns (overrides global Lambda) ** Sigma is the layer's bulk conductivity in 1/(Ohms_per_square*UnitSize_in_metres) - overrides global Sigma ** Order is the layer's order during wafer construction - the lowest layer starts at 0, but does not need to be Ground (as in ADP) ** Mask is the mask polarity: {1 = layer objects define material ** 0 = layer objects not translated to model ** -1 = layer objects define cutots } ** Filmtype is the layer material typ: {S = superconductor, N = normal conductor (not segmented), I = isolator, R = resistor, ** A = auxiliary/don't care} ** ! See User Manual for difference between N (normal conductor) and R (resistor) for modelling purposes ** HFilaments is the number of filaments segments are divided into over the height (overrides global HFilaments) ** GapMax is the largest dimension of any segment that will not be subdivided into equal-sized smaller segments (overrides global GapMax) ** LayerADD is the number of a layer of which objects are added to current layer (OR operation) ** LayerSUB is the number of a layer of which objects are subtracted from the current layer ** Colour is the DXF colour (for viewing purposes) ** * * M0 $Layer Number = 30 Name = M0 Bias = 0.2 Thickness = 0.1 Lambda = 0.078 Order = 0 Mask = -1 Filmtype = S HFilaments = 1 Colour = 130 $End * $Layer Number = 1 Name = M1 Bias = 0.015 Thickness = 0.135 Lambda = 0.112 Order = 2 Mask = 1 Filmtype = S HFilaments = 2 Colour = 10 $End * $Layer Number = 6 Name = M2 Bias = -0.1 Thickness = 0.3 Lambda = 0.0975 Order = 7 Mask = 1 Filmtype = S HFilaments = 3 Colour = 182 $End * $Layer Number = 10 Name = M3 Bias = -0.05 Thickness = 0.6 Lambda = 0.110 Order = 9 Mask = 1 Filmtype = S HFilaments = 3 Colour = 160 $End * * I0 $Layer Number = 31 Name = I0 Bias = 0.2 Thickness = 0.15 Order = 1 Mask = -1 Filmtype = I $End * * I1C $Layer Number = 4 Name = I1C Bias = 0 Thickness = 0.05 Order = 3 Mask = 0 Filmtype = A $End * * I1B $Layer Number = 3 Name = I1B Bias = -0.1 Thickness = 0.19 Order = 6 Mask = -1 Filmtype = I LayerSUB = 9 * We subtract layer 9 (R2) from I1B to eradicate I1B vias to resistors that will * short to M1 otherwise (all normal layers are discarded during segmentation, thus * removing them from the z-directed stack for connectivity checking). $End * * I2 $Layer Number = 8 Name = I2 Bias = 0.2 Thickness = 0.495 Order = 8 Mask = -1 Filmtype = I $End * * R2 $Layer Number = 9 Name = R2 Bias = 0 Thickness = 0.07 Sigma = 6.8027 Order = 5 Mask = 1 Filmtype = N $End * * R3 $Layer Number = 11 Name = R3 Bias = 0 Thickness = 0.35 Sigma = 10 Order = 10 Mask = 1 Filmtype = N $End * * A1 $Layer Number = 5 Name = A1 Bias = 0 Thickness = 0.04 Order = 4 Mask = 0 Filmtype = A $End * * TERM $Layer Number = 63 Name = TERM Bias = 0 Thickness = 0.1 Order = 11 Mask = -4 $End * * OPERATORS ** Define operators here * $Operator Name = GPM3M0 Type = EC LayersRemove = 1 6 31 4 3 8 9 5 LayersConnect = 30 10 $End * $Operator Name = GPM3M2 Type = EC LayersRemove = 8 9 LayersConnect = 6 10 $End * $Operator Name = GPM1M0 Type = EC LayersRemove = 31 LayersConnect = 1 30 $End * $Operator Name = SQJJ Type = MR LayersTransform = 3 4 5 $End